Laminar Air Flow
Each system has an ULPA-filtered laminar recirculating system, delivering controlled airflow. This allows each system to have an ultra-clean, better than Class 1 (Fed. Std. 209b) low humidity cleaning environment.
There is active purging of the system to keep the environment at a low dew point level.
The interior temperature is heated to a temperature above ambient temperature. Substrates are also pre-heated to a moderate temperature preventing condensation.
A variety of advanced electrostatic discharge (ESD) control technologies are available to provide protection against the damaging effects of ESD.